TOKYO ELECTRON AT LIMITED

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 299
 
  
 
H05H PLASMA TECHNIQUE 228
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1205

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

  • No Recent Publications to Display

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7335278 Plasma processing apparatus and plasma processing methodOct 02, 03Feb 26, 08[H01L]
7183219 Method of plasma processingDec 21, 99Feb 27, 07[H01L]
6676804 Method and apparatus for plasma processingJan 02, 01Jan 13, 04[C23C, H05H]
6297064 End point detecting method for semiconductor plasma processingAug 03, 00Oct 02, 01[H01L]
6149760 Plasma processing apparatusOct 15, 98Nov 21, 00[C23C, H05H]
5958258 Plasma processing method in semiconductor processing systemJun 17, 98Sep 28, 99[G01N]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6162323 Plasma processing apparatusExpiredJun 08, 98Dec 19, 00[C23F]
6101970 Plasma processing apparatusExpiredSep 29, 98Aug 15, 00[C23C]
6079357 Plasma processing apparatusExpiredOct 15, 98Jun 27, 00[C23C, H05H]

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.