THERMCO SYSTEMS, INC., A CORP OF CA
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 19, 1990 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 265 Total Citation Count
- Apr 12, 1979 Earliest Filing
- 10 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
4817557 Process and apparatus for low pressure chemical vapor deposition of refractory metalExpiredSep 04, 87Apr 04, 89[C23C]
4726961 Process for low pressure chemical vapor deposition of refractory metalExpiredJun 16, 86Feb 23, 88[C23C, B05D]
4619840 Process and apparatus for low pressure chemical vapor deposition of refractory metalExpiredMay 23, 83Oct 28, 86[H01L]
4376796 Processing silicon wafers employing processing gas atmospheres of similar molecular weightExpiredOct 27, 81Mar 15, 83[H01L]
4369031 Gas control system for chemical vapor deposition systemExpiredSep 15, 81Jan 18, 83[B05C, F27B, F27D]
4228004 Method and apparatus for removal of by-products of chemical vapor deposition from oil for vacuum pumpExpiredApr 12, 79Oct 14, 80[B01D]
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