THERMA CORPORATION
Patent Owner
Stats
- 2 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Aug 05, 2008 most recent publication
Details
- 2 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 242 Total Citation Count
- Feb 05, 2002 Earliest Filing
- 5 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7051743 Apparatus and method for cleaning surfaces of semiconductor wafers using ozoneExpiredOct 29, 02May 30, 06[B08B]
7022193 Apparatus and method for treating surfaces of semiconductor wafers using ozoneExpiredJan 23, 03Apr 04, 06[B08B]
2004/0094,187 Apparatus and method for holding a semiconductor wafer using centrifugal forceAbandonedNov 15, 02May 20, 04[B08B]
2004/0062,874 Nozzle assembly, system and method for wet processing a semiconductor waferAbandonedAug 14, 02Apr 01, 04[B05D, B05B, B01J]
Top Inventors for This Owner
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