TERASEMICON CO., LTD.
Patent Owner
Stats
- 3 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 21, 2011 most recent publication
Details
- 3 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 966 Total Citation Count
- May 06, 2004 Earliest Filing
- 3 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
7963735 Holder manufacturing method for loading substrate of semiconductor manufacturing device, batch type boat having holder, loading/unloading method of semiconductor substrate using the same, and semiconductor manufacturing device having the sameApr 25, 06Jun 21, 11[B65G]
7525068 Heating system of batch type reaction chamber and method thereofAug 31, 06Apr 28, 09[F27B, F26B]
7439116 Apparatus and method for forming polycrystalline silicon thin filmAug 31, 06Oct 21, 08[H01L]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7207763 Semiconductor manufacturing system and wafer holder for semiconductor manufacturing systemExpiredMay 06, 04Apr 24, 07[H01L]
Top Inventors for This Owner
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