TEL SAGAMI LIMITED

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
D327078 Instrument for transferring boats for thermal treatment of semiconductor wafersExpiredJan 25, 89Jun 16, 92[]
D326272 Heat insulating cylinder for thermal treatment of semiconductor wafersExpiredJan 25, 89May 19, 92[]
D326273 Heat insulating cylinder for thermal treatment of semiconductor wafersExpiredJan 25, 89May 19, 92[]
D324057 Instrument for holding boats for thermal treatment of semiconductor wafersExpiredJan 25, 89Feb 18, 92[]
D323332 Handling arm for boats for thermal treatment of semiconductor wafersExpiredJan 25, 89Jan 21, 92[]
D323173 Instrument for transferring boats for thermal treatment of semiconductor wafersExpiredJan 25, 89Jan 14, 92[]
4976613 Heat treatment apparatusExpiredSep 26, 88Dec 11, 90[F27D]

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