TECH Semiconductor Singapore Pte Ltd
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Aug 18, 2011 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 101 Total Citation Count
- Sep 13, 2001 Earliest Filing
- 14 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2011/0201,185 Method to improve transistor performance matching for plasma-assisted source/drain formationAbandonedFeb 17, 10Aug 18, 11[H01L]
7813893 Method of process trend matching for identification of process variableExpiredJan 18, 07Oct 12, 10[G05B]
2010/0241,250 Feedback and feedforward control of a semiconductor process without output values from upstream processesAbandonedMar 18, 09Sep 23, 10[G05B, G06F]
7680556 Method for data collection during manufacturing processesExpiredNov 15, 04Mar 16, 10[H04Q, G05B, G06F, H04J]
7407871 Method for passivation of plasma etch defects in DRAM devicesExpiredSep 05, 06Aug 05, 08[H01L]
7363098 Method to identify machines causing excursion in semiconductor manufacturingExpiredDec 19, 05Apr 22, 08[G06F]
7248975 Real time monitoring of particulate contamination in a wafer processing chamberExpiredSep 20, 05Jul 24, 07[G06F]
7029375 Retaining ring structure for edge control during chemical-mechanical polishingExpiredAug 31, 04Apr 18, 06[B24B]
6893983 Method for depositing a very high phosphorus doped silicon oxide filmExpiredSep 13, 01May 17, 05[H01L]
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