Semitool, Inc.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 3029
 
  
 
C25D PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING 2527
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 21341
 
  
 
C25B ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON- METALS; APPARATUS THEREFOR 530
 
  
 
F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM 426
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 342
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 364
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 398
 
  
 
B05B SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 262
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS297

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7857958 Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesJul 12, 07Dec 28, 10[C25D]
7566386 System for electrochemically processing a workpieceOct 28, 04Jul 28, 09[C25D, C25F]
7520286 Apparatus and method for cleaning and drying a container for semiconductor workpiecesDec 05, 05Apr 21, 09[B08B]
7438788 Apparatus and methods for electrochemical processing of microelectronic workpiecesMar 29, 05Oct 21, 08[C25D]
7429537 Methods and apparatus for rinsing and dryingDec 02, 05Sep 30, 08[H01L]
7357850 Electroplating apparatus with segmented anode arraySep 03, 02Apr 15, 08[C25D]
7288172 Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processingDec 23, 03Oct 30, 07[C25D]
7288179 Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processingDec 23, 03Oct 30, 07[C25D]
7267749 Workpiece processor having processing chamber with improved processing fluid flowMar 26, 03Sep 11, 07[C25D]
7161689 Apparatus and method for processing a microelectronic workpiece using metrologyOct 14, 03Jan 09, 07[G01B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2012/0015,523 SYSTEMS AND METHODS FOR ETCHING SILICON NITRIDEAbandonedJul 15, 10Jan 19, 12[H01L]
7898089 Semiconductor workpieceExpiredOct 26, 07Mar 01, 11[H01L]
2010/0116,671 Apparatus and method for electrochemically depositing metal on a semiconductor workpieceAbandonedOct 03, 06May 13, 10[C25D]
2010/0024,847 SEMICONDUCTOR WAFER CLEANING WITH DILUTE ACIDSAbandonedAug 01, 08Feb 04, 10[B08B]
7625821 Process and apparatus for thinning a semiconductor workpieceExpiredMay 26, 06Dec 01, 09[H01L]
7541299 Method and apparatus for thermally processing microelectronic workpiecesExpiredNov 10, 06Jun 02, 09[H01L, B05C, C21D]
7524406 Processing apparatus including a reactor for electrochemically etching microelectronic workpieceExpiredDec 23, 03Apr 28, 09[C25D]
2009/0022,574 WORKPIECE LOADING SYSTEMAbandonedJul 16, 07Jan 22, 09[H01L, G06F, B66F]
7462269 Method for low temperature annealing of metallization micro-structures in the production of a microelectronic deviceExpiredJun 20, 01Dec 09, 08[C25D]
2008/0264,774 METHOD FOR ELECTROCHEMICALLY DEPOSITING METAL ONTO A MICROELECTRONIC WORKPIECEAbandonedApr 25, 07Oct 30, 08[C23C]
2008/0232,935 Apparatus for removing a semiconductor workpiece from within a fixtureAbandonedMar 19, 07Sep 25, 08[B65H]
2008/0202,564 PROCESSING SYSTEM WITH IN-SITU CHEMICAL SOLUTION GENERATIONAbandonedFeb 27, 07Aug 28, 08[B08B]
2008/0203,083 SINGLE WAFER ANNEAL PROCESSORAbandonedFeb 28, 07Aug 28, 08[H05B, B65G]
2008/0178,460 Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methodsAbandonedJan 29, 07Jul 31, 08[H01S]
2008/0181,758 Microfeature workpiece transfer devices with rotational orientation sensors, and associated systems and methodsAbandonedJan 29, 07Jul 31, 08[B25J]
2008/0110,751 Microelectronic Workpiece Processing Tool Including A Processing Reactor Having A Paddle Assembly for Agitation of a Processing Fluid Proximate to the WorkpieceAbandonedAug 14, 07May 15, 08[C25B]
2008/0083,427 POST ETCH RESIDUE REMOVAL FROM SUBSTRATESAbandonedOct 09, 07Apr 10, 08[B08B, C23G]
2008/0070,411 METHODS FOR UNIFORMLY ETCHING FILMS ON A SEMICONDUCTOR WAFERAbandonedSep 20, 06Mar 20, 08[H01L]
2008/0060,676 WORKPIECE PROCESSING WITH PREHEATAbandonedSep 11, 06Mar 13, 08[B08B, C23G]
2008/0060,683 APPARATUS AND METHODS FOR CLEANING A WAFER EDGEAbandonedSep 08, 06Mar 13, 08[B08B, C23G]

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