SVG LITHOGRAPHY, INC., A CORP OF DE

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1127

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
RE30315 Precision base mercury vapor lampJun 16, 78Jun 24, 80[H01J]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5014031 Ultra precision pressure regulatorExpiredJul 21, 89May 07, 91[H01F]
4986007 Reticle frame assemblyExpiredMar 25, 87Jan 22, 91[B41B]
4973217 Wafer handling systemExpiredApr 17, 89Nov 27, 90[B65G]
4953388 Air gauge sensorExpiredJan 25, 89Sep 04, 90[G01B]
4953960 Optical reduction systemExpiredJul 15, 88Sep 04, 90[G02B]
4952858 Microlithographic apparatusExpiredMay 18, 88Aug 28, 90[G05F]
4933714 Apparatus and method for reproducing a pattern in an annular areaExpiredJun 20, 89Jun 12, 90[G03B]
4929054 Mounting for high resolution projection lensesExpiredOct 03, 86May 29, 90[G02B]
4913524 Synthetic imaging techniqueExpiredMay 12, 88Apr 03, 90[G02B]
4907035 Universal edged-based wafer alignment apparatusExpiredMar 21, 86Mar 06, 90[G01B]
4846626 Wafer handling systemExpiredFeb 09, 87Jul 11, 89[B65G]
4831640 Illumination system for x-ray lithographyExpiredJun 19, 87May 16, 89[G21K]
4804978 Exposure control system for full field photolithography using pulsed sourcesExpiredFeb 19, 88Feb 14, 89[G01D]
4779966 Single mirror projection optical systemExpiredDec 21, 84Oct 25, 88[G02B]
4778332 Wafer flip apparatusExpiredFeb 09, 87Oct 18, 88[B66C]
4772107 Wide angle lens with improved flat field characteristicsExpiredNov 05, 86Sep 20, 88[G02B]
4770477 Lens usable in the ultravioletExpiredDec 04, 86Sep 13, 88[G02B]
4760429 High speed reticle change systemExpiredNov 05, 86Jul 26, 88[G03B]
4750857 Wafer cassette transfer mechanismExpiredMay 05, 86Jun 14, 88[B65G]
4747678 Optical relay system with magnificationExpiredDec 17, 86May 31, 88[G02B]

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Top Inventors for This Owner

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