SUMITOMO MITSUBISHI SILICON CORPORATION
Patent Owner
Stats
- 169 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jan 06, 2015 most recent publication
Details
- 169 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 4,625 Total Citation Count
- Jul 01, 1988 Earliest Filing
- 26 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
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Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2006/0246,723 Slurry composition for chemical mechanical polishing, method for planarization of surface of semiconductor element using the same, and method for controlling selection ratio of slurry compositionAbandonedDec 25, 03Nov 02, 06[H01L]
2005/0017,641 Lamp comprising a lamp body and line feed, which is guided along the exterior of the lamp body, and method for producing the lampAbandonedAug 17, 04Jan 27, 05[H01J]
2005/0000,449 Susceptor for epitaxial growth and epitaxial growth methodAbandonedJan 15, 04Jan 06, 05[C23C]
2004/0232,111 Method and apparatus for etching silicon wafer and method for analysis of impuritiesAbandonedMar 11, 04Nov 25, 04[B44C]
2004/0137,697 Method and apparatus for separating composite substrateAbandonedJan 10, 03Jul 15, 04[H01L]
2003/0230,778 SOI structure having a SiGe Layer interposed between the silicon and the insulatorAbandonedJan 30, 03Dec 18, 03[H01L]
2003/0051,658 Method and apparatus for controlling the oxygen concentration of a silicon single crystal, and method and apparatus for providing guidance for controlling the oxygen concentrationAbandonedJul 23, 02Mar 20, 03[C30B]
2002/0142,170 Silicon single crystal, silicon wafer, and epitaxial waferAbandonedJan 25, 02Oct 03, 02[B32B]
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