STEAG RTP SYSTEMS GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 322
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359
 
  
 
F27B FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS222
 
  
 
A21B BAKERS' OVENS; MACHINES OR EQUIPMENT FOR BAKING 118
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 177
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 1110

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7041610 Method and apparatus for the thermal treatment of substratesOct 19, 00May 09, 06[H01L]
6953338 Device for thermal treatment of substratesJan 19, 01Oct 11, 05[F27D]
6847012 Apparatus and method for measuring the temperature of substratesNov 16, 01Jan 25, 05[F27B]
6830631 Method for the removing of adsorbed molecules from a chamberSep 25, 02Dec 14, 04[B08B]
6752625 Method and apparatus device for the heat treatment of substratesNov 13, 00Jun 22, 04[F27D]
6614005 Device and method for thermally treating substratesDec 13, 01Sep 02, 03[F27B]
6561694 Method and device for calibrating measurements of temperatures independent of emissivityApr 19, 01May 13, 03[G01J]
6462315 Optical radiation measurement apparatusDec 08, 98Oct 08, 02[H05B]
6369363 Method of measuring electromagnetic radiationFeb 16, 01Apr 09, 02[F27D]
6191392 Method of measuring electromagnetic radiationDec 08, 98Feb 20, 01[A21B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7004716 Device and method for aligning disk-shaped substratesExpiredNov 29, 00Feb 28, 06[B25J]
6737367 UV-supported thermal treatment of compound semiconductors in RTP systemsExpiredApr 11, 02May 18, 04[H01L]
6316747 Apparatus for the thermal treatment of substratesExpiredOct 06, 00Nov 13, 01[F27B]

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