STEAG ETA-OPTIK GMBH

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7268871 Measuring head for planar measurement of a sampleExpiredAug 12, 04Sep 11, 07[G01J]
7023555 Measuring apparatusExpiredJan 15, 02Apr 04, 06[G01N]
6753971 Method for determining geometric structures on or in a substrate as well as material parametersExpiredApr 19, 02Jun 22, 04[G01B]

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