SPITZL, RALF

Patent Owner

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
H05H PLASMA TECHNIQUE 228

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6204603 Coaxial resonator microwave plasma generatorFeb 22, 99Mar 20, 01[H05H]
6198224 Microwave plasma generator with the short cross-sectional side of the resonator parallel to the chamber axisFeb 01, 99Mar 06, 01[H05H]

Expired/Abandoned/Withdrawn Patents

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Top Inventors for This Owner

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