SPEEDFAM-IPEC CORPORATION

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B24B MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 759
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 192
 
  
 
B65H HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES178

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2002/0023,719 Method and apparatus for removing a material layer from a substrateAug 30, 01Feb 28, 02[H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7314402 Method and apparatus for controlling slurry distributionNov 15, 01Jan 01, 08[B24B]
6412656 Moistened wipe dispenserNov 14, 00Jul 02, 02[B65H]
6232640 Semiconductor device provided with a field-effect transistor and method of manufacturing the sameOct 06, 99May 15, 01[H01L]
5595529 Dual column abrading machineMar 28, 94Jan 21, 97[B24B]
5569062 Polishing pad conditioningJul 03, 95Oct 29, 96[B24B]
5498199 Wafer polishing method and apparatusJul 15, 94Mar 12, 96[B24B]
5486131 Device for conditioning polishing padsJan 04, 94Jan 23, 96[B24B]
5257478 Apparatus for interlayer planarization of semiconductor materialJan 31, 92Nov 02, 93[B24B]
5254830 System for removing material from semiconductor wafers using a contained plasmaMay 07, 91Oct 19, 93[B23K]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2005/0070,205 INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIERAbandonedSep 30, 03Mar 31, 05[B24B]
6678911 Multiple vertical wafer cleanerExpiredDec 11, 00Jan 20, 04[B08B]
2003/0134,576 Method for polishing copper on a workpiece surfaceAbandonedJan 17, 02Jul 17, 03[B24B]
2003/0077,986 Front-reference carrier on orbital solid platenAbandonedNov 22, 02Apr 24, 03[B24B]
2003/0046,783 Polyvinyl acetate sponge and method for producing sameAbandonedSep 10, 01Mar 13, 03[B32B]
2003/0045,008 Method and apparatus for monitoring changes in the surface of a workpiece during processingAbandonedAug 31, 01Mar 06, 03[H01L, G01R, C23F]
2002/0191,197 Method and apparatus for optical multi-angle endpoint detection during chemical mechanical planarizationAbandonedJun 14, 01Dec 19, 02[G01B]
2002/0170,574 Differential Cleaning for semiconductor wafers with copper circuitryAbandonedMay 21, 01Nov 21, 02[B08B]
2002/0173,237 Apparatus and method for planarizing a workpiece and a workpiece handling wand for use in the methodAbandonedMay 16, 01Nov 21, 02[B24B]
2002/0166,569 Method and apparatus for semiconductor wafer cleaningAbandonedMay 10, 01Nov 14, 02[H01L, B08B]
2002/0155,795 Optical endpoint detection for buff module on CMP toolAbandonedApr 24, 01Oct 24, 02[B24B]
2002/0151,255 Chemical mechanical polishing method and apparatus for removing material from a surface of a workpiece that includes low-k materialAbandonedApr 17, 01Oct 17, 02[B24B]
2002/0151,987 Cascading PID control loops in CMP processAbandonedApr 13, 01Oct 17, 02[G05B]
2002/0145,728 Method and apparatus for a spectrally stable light source using white light LEDsAbandonedApr 06, 01Oct 10, 02[G01J]
2002/0124,730 Method and apparatus for separating liquid in a semiconductor cleaning deviceAbandonedMar 08, 01Sep 12, 02[B01D]
2002/0098,784 Abrasive free polishing in copper damascene applicationsAbandonedJan 19, 01Jul 25, 02[B24B]
2002/0099,465 Methods and apparatus for facilitating communication between devices via an industrial networkAbandonedJan 19, 01Jul 25, 02[G06F]
6415803 Method and apparatus for semiconductor wafer cleaning with reuse of chemicalsExpiredNov 05, 99Jul 09, 02[B08B]
2002/0081,948 Flexible bending member for a workpiece carrier apparatusAbandonedDec 26, 00Jun 27, 02[B24B]
2002/0077,049 Reinforced CMP carrier bladdersAbandonedDec 15, 00Jun 20, 02[B24B]

View all patents..

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.