SORTEC CORPORATION

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5434648 Proximity exposure method and machine thereforExpiredFeb 10, 94Jul 18, 95[G03F]
5325414 X-ray mask alignment method and apparatus therefor as well as X-ray mask to be used to said method and said apparatusExpiredMay 28, 93Jun 28, 94[G21K]
5182610 Position detecting method and device therefor as well as aligning deviceExpiredApr 19, 91Jan 26, 93[G01B]

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