SILICON VALLEY GROUP, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 384
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 398
 
  
 
F27B FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS321
 
  
 
A47B TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE 151
 
  
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 157
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 166
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 135
 
  
 
F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM 129
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 1204
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 196

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7255975 Yield and line width performance for liquid polymers and other materialsSep 16, 03Aug 14, 07[G03F]
6717113 Method for substrate thermal managementJul 02, 02Apr 06, 04[F27B]
6694218 Method and apparatus for resolving conflicts in a substrate processing systemJun 14, 02Feb 17, 04[G06F]
6480330 Ultraviolet polarization beam splitter for microlithographyMar 30, 00Nov 12, 02[G02B, G03B]
6414276 Method for substrate thermal managementMar 07, 00Jul 02, 02[F27B]
6327793 Method for two dimensional adaptive process control of critical dimensions during spin coating processMar 20, 00Dec 11, 01[B05D, F26B]
6238735 Method of uniformly coating a substrateSep 08, 99May 29, 01[B05D]
6091056 Hot plate oven for processing flat panel displays and large wafersSep 26, 97Jul 18, 00[C23C, F27B]
6022414 Single body injector and method for delivering gases to a surfaceJul 14, 97Feb 08, 00[C23C, C23F]
5756157 Method for processing flat panel displays and large wafersOct 02, 96May 26, 98[B05D]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6900413 Hot wall rapid thermal processorExpiredSep 30, 02May 31, 05[F27B]
6844528 Hot wall rapid thermal processorExpiredSep 30, 02Jan 18, 05[F27B]
6680798 Optical reduction system with control of illumination polarizationExpiredApr 25, 01Jan 20, 04[G02B]
2002/0127,883 Bis (tertiarybutylamino) silane and ozone based doped and undoped oxidesAbandonedJan 09, 01Sep 12, 02[H01L]
6101844 Double wall reaction chamber glasswareExpiredFeb 10, 98Aug 15, 00[C23C]
5679168 Thermal processing apparatus and processExpiredNov 28, 95Oct 21, 97[C23C]
5618351 Thermal processing apparatus and processExpiredNov 28, 95Apr 08, 97[C23C]
5320680 Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flowExpiredApr 25, 91Jun 14, 94[C23C]
4934767 Semiconductor wafer carrier input/output drawerExpiredMay 16, 86Jun 19, 90[A47F]
4817557 Process and apparatus for low pressure chemical vapor deposition of refractory metalExpiredSep 04, 87Apr 04, 89[C23C]
4728246 Wafer boat transfer toolExpiredMay 16, 86Mar 01, 88[B65G]
4728869 Pulsewidth modulated pressure control system for chemical vapor deposition apparatusExpiredMar 27, 86Mar 01, 88[H02P]
4726961 Process for low pressure chemical vapor deposition of refractory metalExpiredJun 16, 86Feb 23, 88[C23C, B05D]
4722659 Semiconductor wafer carrier transport apparatusExpiredMay 16, 86Feb 02, 88[B65B]
4711197 Gas scavengerExpiredOct 16, 86Dec 08, 87[C23C]
4700595 Balance mechanism for movable jaw chuck of a spin stationExpiredMay 16, 86Oct 20, 87[B23B]
4694778 Chemical vapor deposition wafer boatExpiredFeb 10, 86Sep 22, 87[C23C, B05C]
4692115 Semiconductor wafer furnace doorExpiredJun 30, 86Sep 08, 87[F27D]
4684863 Semiconductor wafer boat loader control systemExpiredJun 30, 86Aug 04, 87[G05B]
4658855 Mass flow controllerExpiredOct 03, 80Apr 21, 87[G05D]

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