SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, CHINESE ACADEMY OF SCIENCES
Patent Owner
Stats
- 19 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Jan 09, 2018 most recent publication
Details
- 19 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 60 Total Citation Count
- Dec 16, 2004 Earliest Filing
- 1 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2017/0184,455 MEASURING DEVICE FOR POINT DIFFRACTION INTERFEROMETRIC WAVEFRONT ABERRATION AND METHOD FOR DETECTING WAVE ABERRATIONDec 31, 15Jun 29, 17[G01J]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9863841 Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereofDec 31, 15Jan 09, 18[G01J, G01M, G03F]
9804502 Illumination device and method for using the same in the projection lithography machineDec 30, 15Oct 31, 17[G02B, G03B, G03F]
9766154 Multi field point aberration parallel metrology device and method for lithographic projection lensDec 30, 15Sep 19, 17[G01M, G03F]
9709730 Hollow-core photonic crystal fiber gas cell and method for preparing the sameDec 28, 16Jul 18, 17[G01N, G02B]
9709896 Illumination system for lithographic projection exposure step-and-scan apparatusDec 30, 15Jul 18, 17[G03B, G03F]
9658114 Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberrationDec 31, 15May 23, 17[G01J, G01M]
9488525 Method and apparatus for femtosecond laser pulse measurement based on transient-grating effectAug 22, 14Nov 08, 16[G01J, G02B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2005/0134,181 Pulsed high-power flash lamps made of compound quartz glass tubes and process for manufacture thereofAbandonedDec 16, 04Jun 23, 05[H01J]
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