SENTEC CORPORATION

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6868736 Ultra-miniature optical pressure sensing systemExpiredFeb 21, 03Mar 22, 05[G01L, F16C]
6597446 Holographic scatterometer for detection and analysis of wafer surface depositsExpiredMar 22, 01Jul 22, 03[G01N]
6330519 Visibility sensor systemExpiredNov 19, 98Dec 11, 01[G01W]
6141098 Fiber optic temperature sensorExpiredOct 06, 98Oct 31, 00[G01B]
5987995 Fiber optic pressure catheterExpiredJul 17, 97Nov 23, 99[G01L, A61B]
5982288 Visibility sensor systemExpiredApr 01, 98Nov 09, 99[G01W]
5923423 Heterodyne scatterometer for detecting and analyzing wafer surface defectsExpiredSep 04, 97Jul 13, 99[G01B]
5870511 Fiber optic temperature sensorExpiredJan 27, 97Feb 09, 99[G02B]

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