SENSARRAY CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01K MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR 442
 
  
 
G01D MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR 357
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 276
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 2157
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 1446

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7555948 Process condition measuring device with shieldingMay 05, 06Jul 07, 09[G01D]
7540188 Process condition measuring device with shieldingMay 01, 06Jun 02, 09[G01D]
7156924 System and method for heating and cooling wafer at accelerated ratesJul 15, 03Jan 02, 07[C23C]
7151366 Integrated process condition sensing wafer and data analysis systemNov 19, 03Dec 19, 06[G01R]
7149643 Integrated process condition sensing wafer and data analysis systemJun 21, 05Dec 12, 06[G06F]
7135852 Integrated process condition sensing wafer and data analysis systemApr 29, 04Nov 14, 06[G01R]
6616332 Optical techniques for measuring parameters such as temperature across a surfaceNov 18, 99Sep 09, 03[G01K]
6325536 Integrated wafer temperature sensorsJul 10, 98Dec 04, 01[G01K]
6190040 Apparatus for sensing temperature on a substrate in an integrated circuit fabrication toolMay 10, 99Feb 20, 01[G01K, G01J]
5967661 Temperature calibration substrateJun 02, 97Oct 19, 99[G01J]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7415312 Process module tuningExpiredMay 26, 04Aug 19, 08[G05B]
7360463 Process condition sensing wafer and data analysis systemExpiredOct 14, 03Apr 22, 08[G01D]
2007/0113,652 Wireless Position Sensing WaferAbandonedOct 06, 06May 24, 07[G01P, G01D]
6915589 Sensor positioning systems and methodsExpiredOct 16, 03Jul 12, 05[G01D]
2003/0173,346 System and method for heating and cooling wafer at accelerated ratesAbandonedMar 18, 02Sep 18, 03[F27B, F27D]
5929689 Photodetector quiescent current compensation method and apparatusExpiredSep 05, 97Jul 27, 99[G06G]

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