SEN CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 12116
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 11351
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 299
 
  
 
A61N ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY 1106
 
  
 
C25F PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR 117
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 1158
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 145
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 1110

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0148,633 ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHODFeb 03, 17May 25, 17[C23C, H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9646837 Ion implantation method and ion implantation apparatusDec 10, 12May 09, 17[H01J, H01L]
9601314 Ion implantation apparatus and ion implantation methodJun 13, 12Mar 21, 17[H01J]
9312163 Impurity-doped layer formation apparatus and electrostatic chuck protection methodJul 13, 12Apr 12, 16[H01J, H01L]
9305784 Ion implantation method and ion implantation apparatusJan 23, 13Apr 05, 16[H01J, H01L, A61N]
9165772 Ion implantation method and ion implantation apparatusApr 23, 14Oct 20, 15[C23C, H01J, H01L, G01R]
9153405 Ion source device and ion beam generating methodMar 14, 13Oct 06, 15[H01J, H05B]
9023720 Manufacturing method of semiconductor deviceAug 25, 11May 05, 15[H01L]
8772142 Ion implantation method and ion implantation apparatusMar 21, 12Jul 08, 14[H01L]
8772741 Ion implantation method and ion implantation apparatusMar 28, 12Jul 08, 14[H01J]
8759801 Ion implantation apparatus and ion implantation methodOct 16, 12Jun 24, 14[H01J, G21K]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2012/0015,507 PLASMA DOPING APPARATUS AND PLASMA DOPING METHODAbandonedJul 15, 11Jan 19, 12[C23C, H01L]
7411709 Beam processing system and beam processing methodExpiredJun 01, 07Aug 12, 08[G02B]
2007/0044,717 Segmented resonant antenna for radio frequency inductively coupled plasmasAbandonedOct 06, 06Mar 01, 07[C23C]
6894589 Radio frequency resonator and method for producing the sameExpiredMar 19, 02May 17, 05[H01P]
6803590 Ion beam mass separation filter, mass separation method thereof and ion source using the sameExpiredMar 04, 03Oct 12, 04[H11J]
6663791 Detection method of coating film thickness and ion implantation equipment using this methodExpiredAug 03, 00Dec 16, 03[G01N, G01R, G01D]

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