SEN CORPORATION, AN SHI AND AXCELIS COMPANY

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 14114
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 4358
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 343
 
  
 
B65H HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES277
 
  
 
G21G CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES 215
 
  
 
B01D SEPARATION 1133
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 166
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 135
 
  
 
C25F PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR 117

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8096744 Wafer processing system, wafer processing method, and ion implantation systemOct 21, 05Jan 17, 12[H01L]
7982192 Beam processing apparatusApr 21, 08Jul 19, 11[H01J]
7947129 Ion source apparatus and cleaning optimized method thereofJun 04, 04May 24, 11[C25F]
7851772 Ion implantation apparatus and ion implantation methodApr 10, 08Dec 14, 10[H01J, G21K]
7791049 Ion implantation apparatusApr 10, 08Sep 07, 10[H01J, G21K]
7755067 Ion implantation apparatus and method of converging/shaping ion beam used thereforApr 10, 08Jul 13, 10[H01J, H01L, G21K]
7718980 Beam processing system and beam processing methodMay 30, 07May 18, 10[H01J]
7687782 Electrostatic beam deflection scanner and beam deflection scanning methodMay 30, 07Mar 30, 10[H01J, G21K]
7429743 Irradiation system ion beam and method to enhance accuracy of irradiationAug 12, 05Sep 30, 08[H01L]
7423276 Irradiation system with ion beam/charged particle beamAug 12, 05Sep 09, 08[G21K]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7597531 Method of controlling mover deviceExpiredJan 28, 05Oct 06, 09[C23C, H02K, H01L, B65H, C23F]
6984833 Ion implanter and method for controlling the sameExpiredJun 10, 04Jan 10, 06[H01J]
6803590 Ion beam mass separation filter, mass separation method thereof and ion source using the sameExpiredMar 04, 03Oct 12, 04[H11J]
6663791 Detection method of coating film thickness and ion implantation equipment using this methodExpiredAug 03, 00Dec 16, 03[G01N, G01R, G01D]
5046992 Robot arm capable of three-dimensionally moving a robot arm memberExpiredNov 13, 90Sep 10, 91[F16H]
5030835 Ion implantation capable of uniformly injecting an ion beam into a substrateExpiredNov 21, 89Jul 09, 91[H01J]
4994674 Ion implantation apparatus capable of avoiding electrification of a substrateExpiredMay 08, 90Feb 19, 91[H01J]

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