SEMICONDUCTOR EQUIPMENT GROUP, LLC
Patent Owner
Stats
- 1 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Mar 08, 2011 most recent publication
Details
- 1 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 43 Total Citation Count
- Nov 21, 1985 Earliest Filing
- 2 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
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Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
7901783 Low κ dielectric inorganic/organic hybrid films and method of makingNov 29, 06Mar 08, 11[B32B]
Expired/Abandoned/Withdrawn Patents
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