SEMICAT, INC.
Patent Owner
Stats
- 4 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Sep 12, 2017 most recent publication
Details
- 4 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 10 Total Citation Count
- Aug 31, 2009 Earliest Filing
- 5 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9761441 Physical vapor deposition methods and systems to form semiconductor films using counterbalance magnetic field generatorsJul 06, 15Sep 12, 17[C23C, H01J, H01L]
9380692 Apparatus and arrangements of magnetic field generators to facilitate physical vapor deposition to form semiconductor filmsMar 15, 13Jun 28, 16[C23C, H01J, H05H, H01F]
8956516 System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substratesAug 31, 09Feb 17, 15[C23C, H01J]
8936703 Methods to fabricate non-metal films on semiconductor substrates using physical vapor depositionAug 31, 09Jan 20, 15[C23C, H01L]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2016/0013,035 SYSTEM AND APPARATUS TO FACILITATE PHYSICAL VAPOR DEPOSITION TO MODIFY NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATESAbandonedFeb 17, 15Jan 14, 16[H01J, C23C, H01L]
2015/0372,231 METHODS TO FABRICATE NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATES USING PHYSICAL VAPOR DEPOSITIONAbandonedJan 13, 15Dec 24, 15[C23C, H01L]
2014/0262,754 PHYSICAL VAPOR DEPOSITION METHODS AND SYSTEMS TO FORM SEMICONDUCTOR FILMS USING COUNTERBALANCE MAGNETIC FIELD GENERATORSAbandonedMar 15, 13Sep 18, 14[C23C, H01L]
2014/0069,130 TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERSAbandonedSep 10, 12Mar 13, 14[F25B, G05D, F28F]
2014/0069,334 TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERS BY MODULATING PLASMA GENERATION ENERGYAbandonedSep 10, 12Mar 13, 14[H01L, H05H]
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