SEMEQUIP, INC.
Patent Owner
Stats
- 30 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 17, 2014 most recent publication
Details
- 30 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 2,520 Total Citation Count
- Dec 13, 2000 Earliest Filing
- 43 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
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Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8618514 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ionsNov 02, 11Dec 31, 13[H01J]
8530343 System and method for the manufacture of semiconductor devices by the implantation of carbon clustersJun 27, 11Sep 10, 13[H01L]
8410459 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ionsMay 06, 11Apr 02, 13[H01J, G21K]
8097529 System and method for the manufacture of semiconductor devices by the implantation of carbon clustersJul 24, 09Jan 17, 12[H01L]
8084007 Methods of synthesis of isotropically enriched borohydride and methods of synthesis of isotropically enriched boranesDec 31, 09Dec 27, 11[C01B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2014/0061,816 ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONSAbandonedNov 06, 13Mar 06, 14[H01L]
8586459 Ion implantation with molecular ions containing phosphorus and arsenicExpiredNov 05, 07Nov 19, 13[H01L]
8436326 Ion beam apparatus and method employing magnetic scanningExpiredNov 17, 10May 07, 13[H01J, H01L]
8368309 Method and apparatus for extracting ions from an ion source for use in ion implantationExpiredDec 29, 06Feb 05, 13[H01J]
8236675 Semiconductor device and method of fabricating a semiconductor deviceExpiredOct 02, 09Aug 07, 12[H01L]
8071958 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ionsExpiredNov 11, 08Dec 06, 11[H01J]
8013312 Vapor delivery system useful with ion sources and vaporizer for use in such systemExpiredNov 21, 07Sep 06, 11[C23C, G05D]
7994031 Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ionsExpiredDec 29, 06Aug 09, 11[H01L]
7955580 Isotopically-enriched boranes and methods of preparing themExpiredJan 21, 05Jun 07, 11[C01B]
7641879 Methods of synthesis of isotopically enriched borohydride and methods of synthesis of isotopically enriched boranesExpiredJan 28, 05Jan 05, 10[C01B]
7629590 Method and apparatus for extending equipment uptime in ion implantationExpiredDec 29, 06Dec 08, 09[H01J]
2009/0250,603 MAGNETIC ANALYZER APPARATUS AND METHOD FOR ION IMPLANTATIONAbandonedJun 13, 07Oct 08, 09[H01J, A61N]
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