QUANTUM GLOBAL TECHNOLOGIES LLC

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 2137
 
  
 
C23G CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS 49
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 4358
 
  
 
B44C PRODUCING DECORATIVE EFFECTS 331
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 291
 
  
 
B65D CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES 296
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 299
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 234
 
  
 
C25F PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR 216
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2102

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9068273 Electrochemical removal of tantalum-containing materialsJun 10, 11Jun 30, 15[C23C, C22B, C23F, C25F]
8714166 Method and apparatus for showerhead cleaningJan 24, 13May 06, 14[B08B]
8492674 Methods and apparatus for ex situ seasoning of electronic device manufacturing process componentsAug 09, 08Jul 23, 13[B23K]
8372211 Method and apparatus for showerhead cleaningSep 14, 10Feb 12, 13[B08B]
8142989 Textured chamber surfaceNov 13, 09Mar 27, 12[G03F]
8118946 Cleaning process residues from substrate processing chamber componentsNov 30, 07Feb 21, 12[B08B]
8097089 Methods for cleaning process kits and chambers, and for ruthenium recoveryDec 18, 08Jan 17, 12[H01G]
7964085 Electrochemical removal of tantalum-containing materialsJun 17, 04Jun 21, 11[B23H, H05K]
7789969 Methods and apparatus for cleaning chamber componentsOct 31, 07Sep 07, 10[B08B]
7754609 Cleaning processes for silicon carbide materialsOct 28, 03Jul 13, 10[B08B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0190,937 System and Method for Cleaning Semiconductor Fabrication Equipment PartsAbandonedMar 13, 14Jul 10, 14[B44C]
2014/0076,354 REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTSAbandonedNov 22, 13Mar 20, 14[B08B]
2012/0216,833 REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEMAbandonedFeb 24, 11Aug 30, 12[B08B]
2009/0218,042 Methods For Producing Quartz Parts With Low Defect And Impurity Densities For Use In Semiconductor ProcessingAbandonedMay 12, 09Sep 03, 09[C01B, H01L, C04B]
2009/0000,641 METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCHAbandonedJun 26, 08Jan 01, 09[B08B]
2008/0092,806 REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTSAbandonedOct 19, 06Apr 24, 08[B08B]
2007/0111,642 Apparatus and methods for slurry cleaning of etch chambersAbandonedNov 14, 05May 17, 07[B24C]
2006/0180,180 System and method for cleaning semiconductor fabrication equipment partsAbandonedApr 07, 06Aug 17, 06[B08B]
2005/0233,926 Etchants for removing titanium contaminant species from titanium substratesAbandonedFeb 09, 05Oct 20, 05[B08B, C11D]
2005/0215,059 Process for producing semi-conductor coated substrateAbandonedMar 24, 04Sep 29, 05[H01L]
6004400 Carbon dioxide cleaning processExpiredJul 09, 97Dec 21, 99[B08B]

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