PIEZONICS CO., LTD.
Patent Owner
Stats
- 5 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Oct 25, 2016 most recent publication
Details
- 5 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 85 Total Citation Count
- May 11, 2004 Earliest Filing
- 0 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
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Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9476121 Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofSep 18, 14Oct 25, 16[C23C, H01L]
9469900 Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofSep 18, 14Oct 18, 16[C23C, H01L]
8298370 Apparatus for chemical vapor deposition (CVD) with showerheadJan 09, 09Oct 30, 12[C23C, H01L, C23F]
7485339 Method for chemical vapor deposition capable of preventing contamination and enhancing film growth rateNov 21, 06Feb 03, 09[C23C]
Expired/Abandoned/Withdrawn Patents
- No Patents to Display
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