PHYZCHEMIX CORPORATION

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2006/0191,477 Apparatus for the formation of a metal filmAbandonedMar 29, 06Aug 31, 06[C23C]
2006/0177,583 Method for the formation of a metal filmAbandonedMar 29, 06Aug 10, 06[C23C, B44C]
2006/0054,593 Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatusAbandonedOct 19, 05Mar 16, 06[H01L, B44C]
2004/0091,636 Methods and apparatus for the formation of a metal filmAbandonedOct 15, 03May 13, 04[C23C, H05H]

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