Nagase CMS Technology Co., Ltd.
Patent Owner
Stats
- 3 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Sep 19, 2006 most recent publication
Details
- 3 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 53 Total Citation Count
- Feb 06, 2002 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
6752545 Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipmentAug 09, 02Jun 22, 04[G03D]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7109037 Water-based resist stripping liquid management apparatus and water-based resist stripping liquid management methodExpiredJun 25, 02Sep 19, 06[G01N]
7101517 Processing solution preparation and supply method and apparatusExpiredJan 15, 03Sep 05, 06[B01J]
2003/0141,246 Regenerating apparatus and method for resist stripping waste liquidsAbandonedNov 27, 02Jul 31, 03[B01D]
2002/0197,079 Non-water-based resist stripping liquid management apparatus and non-water-based resist stripping liquid management methodAbandonedJun 21, 02Dec 26, 02[G03D]
Top Inventors for This Owner
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