NUFLARE TECHNOLOGY, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 21623
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 617
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 55151
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 4655
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 4564
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 45317
 
  
 
G06T IMAGE DATA PROCESSING OR GENERATION, IN GENERAL 3996
 
  
 
C30B SINGLE-CRYSTAL GROWTH 3720
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 36162
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 35412

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0066,381 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODSep 01, 17Mar 08, 18[C23C, H01L, C30B]
2018/0057,938 VAPOR-PHASE GROWTH METHODAug 28, 17Mar 01, 18[C23C, H01L]
2017/0315,070 PATTERN INSPECTION APPARATUSApr 26, 17Nov 02, 17[G01N, G01B]
2017/0298,512 SHOWER HEAD, VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODApr 13, 17Oct 19, 17[C23C, H01L]
2017/0283,985 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODJun 15, 17Oct 05, 17[C23C, H01L, C30B]
2017/0275,755 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODJun 12, 17Sep 28, 17[C23C, C30B]
2017/0278,672 CHARGED PARTICLE BEAM WRITING METHOD, AND CHARGED PARTICLE BEAM WRITING APPARATUSMar 06, 17Sep 28, 17[H01J]
2017/0270,656 METHOD FOR INSPECTING BLANKING PLATEFeb 06, 17Sep 21, 17[G06T, G03F, G06K]
2017/0243,716 INSPECTION APPARATUS AND INSPECTION METHODNov 22, 16Aug 24, 17[H01J]
2017/0243,718 CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHODFeb 08, 17Aug 24, 17[H01J]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9922415 Inspection method, inspection apparatus, and inspection systemMar 16, 16Mar 20, 18[G06T, G01N, G06K]
9916962 Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment methodMar 22, 17Mar 13, 18[H01J]
9916996 Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unitMay 08, 15Mar 13, 18[C23C, H01L, C30B]
9899187 Charged particle beam writing apparatus and charged particle beam writing methodMar 28, 16Feb 20, 18[H01J]
9879359 Silicon carbide semiconductor film-forming apparatus and film-forming method using the sameJun 19, 14Jan 30, 18[C23C, H01L, C30B]
9880215 Inspection method for blanking device for blanking multi charged particle beamsAug 26, 15Jan 30, 18[H01J, G01R]
9881770 Multi charged particle beam exposing method, and multi charged particle beam exposing apparatusJan 13, 17Jan 30, 18[H01J]
9873941 Film-forming manufacturing apparatus and methodJul 29, 15Jan 23, 18[C23C, C30B]
9875876 Charged particle beam writing apparatus and charged particle beam writing methodDec 20, 16Jan 23, 18[H01J]
9869035 Vapor phase growth apparatus and vapor phase growth methodDec 14, 15Jan 16, 18[C23C, C30B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0340,800 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedMay 17, 16Nov 24, 16[C30B]
2016/0263,625 METHOD OF CLEANING MASK COVER AND CLEANING BOARDAbandonedFeb 23, 16Sep 15, 16[B08B]
2016/0238,636 METHOD FOR ESTIMATING LIFETIME OF CATHODE IN ELECTRON BEAM LITHOGRAPHY APPARATUSAbandonedFeb 10, 16Aug 18, 16[H01J, G01R]
2016/0203,949 CHARGED PARTICLE BEAM DRAWING APPARATUSAbandonedJan 05, 16Jul 14, 16[H01J]
2016/0115,622 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedOct 23, 15Apr 28, 16[C30B]
2016/0102,401 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedOct 07, 15Apr 14, 16[C23C, H01L]
9273412 Film-forming apparatus and film-forming methodWithdrawnJun 19, 12Mar 01, 16[C30B]
2015/0332,914 SEMICONDUCTOR SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR SUBSTRATE, AND SEMICONDUCTOR DEVICEAbandonedMay 12, 15Nov 19, 15[H01L]
9165747 Charged particle beam drawing apparatus and drawing chamberWithdrawnJul 09, 14Oct 20, 15[H01J]
2015/0279,659 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedMar 27, 15Oct 01, 15[C23C, H01L]
2015/0233,017 VAPOR PHASE GROWTH METHODAbandonedFeb 17, 15Aug 20, 15[C30B]
2015/0138,541 OBJECTIVE LENS SWITCHING MECHANISM AND INSPECTION APPARATUSAbandonedNov 14, 14May 21, 15[G01N, G02B]
2015/0022,812 INSPECTION APPARATUSAbandonedJul 16, 14Jan 22, 15[G01N]
2015/0013,594 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedJul 02, 14Jan 15, 15[C30B]
2015/0011,077 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedJun 30, 14Jan 08, 15[H01L]
2014/0370,691 VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHODAbandonedJun 11, 14Dec 18, 14[H01L]
2014/0197,326 CHARGED PARTICLE BEAM WRITING METHODAbandonedJan 07, 14Jul 17, 14[H01J]
2013/0256,555 SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING APPARATUSAbandonedMar 26, 13Oct 03, 13[H01J]
2013/0247,816 FILM-FORMING APPARATUS FOR THE FORMATION OF SILICON CARBIDE AND FILM-FORMING METHOD FOR THE FORMATION OF SILICON CARBIDEAbandonedMar 15, 13Sep 26, 13[H01L]
2013/0152,853 FILM-FORMING APPARATUS AND FILM-FORMING METHODAbandonedDec 14, 12Jun 20, 13[C30B]

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Top Inventors for This Owner

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