NISSIN ION EQUIPMENT CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 5873
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 9353
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 838
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 695
 
  
 
A61N ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY 3104
 
  
 
G21G CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES 215
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 2109
 
  
 
H05H PLASMA TECHNIQUE 228
 
  
 
B01D SEPARATION 1133
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 135

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0236,686 ION BEAM IRRADIATION APPARATUSMay 03, 17Aug 17, 17[H01J, H01L]
2016/0086,759 Plasma Generator With at Least One Non-Metallic ComponentDec 07, 15Mar 24, 16[H01J]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9865422 Plasma generator with at least one non-metallic componentDec 07, 15Jan 09, 18[H01J, C23C]
9784317 Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying methodJan 28, 15Oct 10, 17[F16N, F16C]
9734982 Beam current density distribution adjustment device and ion implanterMay 24, 16Aug 15, 17[H01J, C23C, G21K]
9728371 Ion beam scanner for an ion implanterMay 27, 15Aug 08, 17[H01J]
9728390 Mass analyzing electromagnet and ion beam irradiation apparatusOct 06, 15Aug 08, 17[H01J]
9601359 Substrate holding device, semiconductor fabrication device, and substrate clamping ascertainment methodJul 17, 14Mar 21, 17[H01L]
9502213 Ion beam lineAug 20, 15Nov 22, 16[H01J]
9299529 Ion source and repeller structureFeb 29, 12Mar 29, 16[C23C, H01J, C25B]
9275819 Magnetic field sources for an ion sourceMar 15, 13Mar 01, 16[H01J]
9230776 Ion irradiation apparatus and ion irradiation methodJan 14, 15Jan 05, 16[H01J]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0238,300 ION BEAM IRRADIATION APPARATUSAbandonedOct 30, 13Aug 28, 14[C23C]
2014/0238,637 ION BEAM IRRADIATION APPARATUS AND METHOD FOR SUBSTRATE COOLINGAbandonedNov 11, 13Aug 28, 14[F28F]
2014/0199,492 ION IMPLANTER AND METHOD OF OPERATING ION IMPLANTERAbandonedOct 25, 13Jul 17, 14[C23C]
8664861 Plasma generatorExpiredSep 17, 13Mar 04, 14[H05B]
8604683 Bucket-type ion source for fanning cusped magnetic fields inside a plasma generation chamberExpiredMar 09, 12Dec 10, 13[H01J]
8519363 Wafer handling method and ion implanterExpiredNov 03, 10Aug 27, 13[H01J]
2013/0105,705 ION BEAM EXTRACTION ELECTRODE AND ION SOURCEAbandonedOct 30, 12May 02, 13[H01J]
8164070 Collimator magnet for ion implantation systemExpiredDec 05, 08Apr 24, 12[H01J]
8153995 Ion implanting apparatusExpiredAug 21, 09Apr 10, 12[H01J]
8011988 Method for assembling indirectly-heated cathode assemblyExpiredJun 16, 09Sep 06, 11[H01J]
7772573 Ion implanting apparatus and method of correcting beam orbitExpiredJun 02, 09Aug 10, 10[H01J, G21K, B01D]
7635850 Ion implanterExpiredOct 10, 07Dec 22, 09[H01J]
2009/0283,703 ION BEAM IRRADIATION APPARATUS AND ION BEAM MEASURING METHODAbandonedMay 19, 09Nov 19, 09[G21K, A61N]
7605382 Ion implanterExpiredOct 30, 07Oct 20, 09[H01J, G05F]
7498572 Deflecting electromagnet and ion beam irradiating apparatusExpiredSep 12, 06Mar 03, 09[H01J, B01D]
7439527 Ion beam irradiation apparatusExpiredMay 08, 06Oct 21, 08[G21K]
7435976 Ion beam deviceExpiredDec 02, 04Oct 14, 08[H01J]
7436075 Ion beam irradiation apparatus and ion beam irradiation methodExpiredAug 31, 05Oct 14, 08[H01L]
7375354 Ion implanting method and apparatusExpiredMar 15, 04May 20, 08[H01J]
7367139 Vacuum processing apparatus and method operation thereofExpiredJun 19, 06May 06, 08[F26B]

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