MRS Technology, Inc.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS198
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 196
 
  
 
H02K DYNAMO-ELECTRIC MACHINES 1106

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5991004 Lens focus shift sensorApr 03, 96Nov 23, 99[G03B, G01B]
5828142 Platen for use with lithographic stages and method of making sameAug 22, 97Oct 27, 98[H02K]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5483345 Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection objectExpiredSep 06, 94Jan 09, 96[G01B]

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