MKS INSTRUMENTS, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01L MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE 7911
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 5279
 
  
 
G01F MEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME 4123
 
  
 
F16K VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING3737
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 3071
 
  
 
G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES 3054
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 2766
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 24182
 
  
 
H03F AMPLIFIERS 2459
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 2388

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0309,456 Toroidal Plasma Channel with Varying Cross-Section Areas Along the ChannelJul 10, 17Oct 26, 17[H01J, C23C, F17D, H05H, G21B]
2017/0292,633 ACTIVELY COOLED VACUUM ISOLATION VALVEApr 04, 17Oct 12, 17[F16K]
2017/0036,906 STRESS RELIEF MEMS STRUCTURE AND PACKAGEOct 19, 16Feb 09, 17[B81C, B81B]
2016/0181,063 COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLSFeb 29, 16Jun 23, 16[H01J, C01B]
2016/0115,025 Method and Apparatus for a Directly Electrically Heated Flow-Through Chemical ReactorJan 07, 16Apr 28, 16[C01B]
2014/0263,199 Pulse Synchronization By Monitoring Power In Another Frequency BandMar 15, 13Sep 18, 14[B23K]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9876476 Supervisory control of radio frequency (RF) impedance tuning operationAug 18, 15Jan 23, 18[H03F, H03H]
9865426 Compact, configurable power supply for energizing ozone-producing cellsFeb 29, 16Jan 09, 18[H01J, C01B]
9850123 Stress relief MEMS structure and packageOct 19, 16Dec 26, 17[H01L, B81C, B81B]
9846074 System for and method of monitoring flow through mass flow controllers in real timeJan 20, 12Dec 19, 17[G05D, G01F]
9831066 Compact microwave plasma applicator utilizing conjoining electric fieldsMay 27, 16Nov 28, 17[H01J]
9806685 Trans-impedance amplifier with increased dynamic rangeMay 13, 16Oct 31, 17[H03F]
9796603 ) recirculation reclaim systemFeb 02, 17Oct 24, 17[H01L, C02F, B01D]
9797797 Cold cathode ionization vacuum gaugeNov 10, 14Oct 24, 17[H01J, G01L]
9748864 Power supply circuits incorporating transformers for combining of power amplifier outputs and isolation of load voltage clamping circuitsJun 26, 15Aug 29, 17[H02M, H03F]
9739708 Systems and methods for pressure differential molecular spectroscopy of compressible fluidsOct 11, 16Aug 22, 17[G01N]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0233,055 Apparatus and Method for Metastable Enhanced Plasma IgnitionAbandonedFeb 06, 15Aug 11, 16[H01J, H05H]
2016/0202,706 DIGITALIZATION OF ANALOG MFC CONTROL INPUTAbandonedJan 14, 15Jul 14, 16[G05B, G05D]
2015/0287,575 Toroidal Plasma Channel with Varying Cross-Section Areas Along the ChannelAbandonedJun 17, 15Oct 08, 15[H01J]
2015/0279,626 MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITYAbandonedMar 27, 14Oct 01, 15[H01J]
2015/0232,333 Method and Apparatus for a Directly Electrically Heated Flow-Through Chemical ReactorAbandonedFeb 25, 14Aug 20, 15[C01B, B01J]
2014/0326,909 PRESSURE-BALANCED CONTROL VALVESAbandonedApr 30, 14Nov 06, 14[F16K]
2014/0298,884 SELF-CALIBRATING PRESSURE SENSOR SYSTEM WITH PRESSURE SENSOR AND REFERENCE SENSOR THAT SHARE COMMON SEALED CHAMBERAbandonedDec 09, 13Oct 09, 14[G01L]
2014/0081,581 MEASUREMENT INSTRUMENT AND METHODAbandonedNov 18, 13Mar 20, 14[G01L, G01N, G01D]
2014/0062,285 Method and Apparatus for a Large Area Inductive Plasma SourceAbandonedAug 29, 12Mar 06, 14[H05H]
8658936 Method and apparatus for processing metal bearing gasesWithdrawnDec 23, 11Feb 25, 14[B23K, H01H]
8589107 Measurement instrument and methodExpiredJun 01, 12Nov 19, 13[G01L, G06F, G01D]
2013/0146,225 GAS INJECTOR APPARATUS FOR PLASMA APPLICATORAbandonedDec 08, 11Jun 13, 13[F16L, B44C]
2013/0118,589 Toroidal Plasma Channel with Varying Cross-Section Areas Along the ChannelAbandonedNov 08, 12May 16, 13[F17D]
2013/0025,786 SYSTEMS FOR AND METHODS OF CONTROLLING TIME-MULTIPLEXED DEEP REACTIVE-ION ETCHING PROCESSESAbandonedJul 28, 11Jan 31, 13[H01L, F15D, C23F]
8334505 Chemical ionization reaction or proton transfer reaction mass spectrometryExpiredFeb 06, 08Dec 18, 12[H01J]
2012/0303,142 AUTOMATED MODEL BUILDING AND MODEL UPDATINGAbandonedAug 07, 12Nov 29, 12[G05B]
2012/0286,806 Measuring Bulk LifetimeAbandonedNov 09, 11Nov 15, 12[G01N]
8271122 Process control using process data and yield dataExpiredJul 22, 11Sep 18, 12[G06F]
8195418 Pressure measurement instrument and methodExpiredApr 25, 07Jun 05, 12[G01L, G06F, G01D]
2012/0081,132 Measuring Minority Carrier LifetimeAbandonedApr 05, 11Apr 05, 12[G01R, H01F]

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