MATTSON THERMAL PRODUCTS

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 1446

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7412299 Process for determining the temperature of a semiconductor wafer in a rapid heating unitNov 28, 03Aug 12, 08[G06F]
7169717 Method of producing a calibration waferNov 13, 03Jan 30, 07[H01L]
7144826 Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environmentApr 19, 02Dec 05, 06[H01L]
7056389 Method and device for thermal treatment of substratesMay 23, 02Jun 06, 06[C23C]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2004/0126,213 Device for accommodating disk-shaped objects and apparatus for handling objectsAbandonedNov 18, 03Jul 01, 04[B65B]

Top Inventors for This Owner

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