M FSI LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 157
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 135

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7238295 Regeneration process of etching solution, etching process, and etching systemSep 15, 03Jul 03, 07[C23F]
6444589 Method and apparatus for etching siliconJul 13, 00Sep 03, 02[H01L]
5470421 Method for purification of etching solutionSep 15, 94Nov 28, 95[H01L]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6983756 Substrate treatment process and apparatusExpiredApr 20, 04Jan 10, 06[B08B]
2005/0183,749 Substrate cleaning apparatusAbandonedMar 02, 05Aug 25, 05[B08B]
2005/0183,750 Substrate cleaning apparatusAbandonedMar 02, 05Aug 25, 05[B08B]
2005/0150,530 Substrate cleaning apparatusAbandonedMar 02, 05Jul 14, 05[B08B]
6874516 Substrate cleaning apparatusExpiredMay 30, 02Apr 05, 05[B08B]
6866723 Wet cleaning process and wet cleaning equipmentExpiredAug 06, 01Mar 15, 05[B08B]
6743301 Substrate treatment process and apparatusExpiredDec 22, 00Jun 01, 04[B08B]
2004/0049,301 Apparatus and method for preparing and supplying slurry for CMP machineAbandonedSep 05, 03Mar 11, 04[G05B]
2001/0053,585 Cleaning process for substrate surfaceAbandonedMay 02, 01Dec 20, 01[H01L]
4980017 Method for recirculating high-temperature etching solutionExpiredSep 26, 89Dec 25, 90[C23F]

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