LEO ELEKTRONENMIKROSKOPIE GMBH
Patent Owner
Stats
- 15 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 13, 2006 most recent publication
Details
- 15 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 263 Total Citation Count
- Dec 05, 1997 Earliest Filing
- 3 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
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Recent Publications
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Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
7060978 Detector system for a particle beam apparatus, and particle beam apparatus with such a detector systemMar 14, 01Jun 13, 06[H01J]
6855939 Particle beam system having a mirror correctorAug 20, 03Feb 15, 05[G01J, G21K, G01N, H05H, G01T]
6707041 Detector for a scanning electron microscope with variable pressure and scanning electron microscope with such detectorMay 29, 02Mar 16, 04[H01J]
6657211 Process for electron beam lithography, and electron-optical lithography systemJul 16, 01Dec 02, 03[H01J]
6531698 Particle-optic illuminating and imaging system with a condenser-objective single field lensSep 22, 00Mar 11, 03[H01J]
Expired/Abandoned/Withdrawn Patents
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Title
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