LAM RESEARCH CORPORATION
Patent Owner
Back to search results Back to News FeedStats
- 28 2,189 US PATENTS IN FORCE
- 341 US APPLICATIONS PENDING
- Feb 01, 2018 most recent publication
Details
- 2,189 Issued Patents
- 542 Issued in last 3 years
- 303 Published in last 3 years
- 37,614 Total Citation Count
- Nov 03, 1980 Earliest Filing
- 523 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
MATTERS
Rank in Class
Intl Class
Technology
MATTERS
Rank in Class
- No Technologies to Display
Top Patents (by citation)
Upgrade to the Premium Level to View Top Patents for this Owner. Learn More |
Patent #
Title
Filing Date
Issue Date
Intl Class
CITATIONS
5401350
Coil configurations for improved uniformity in inductively coupled plasma systems
Mar 08, 93
Mar 28, 95
[H05H]
253
5356478
Plasma cleaning method for removing residues in a plasma treatment chamber
Jan 03, 94
Oct 18, 94
[B08B]
227
5820723
Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
Jun 05, 96
Oct 13, 98
[C23F]
214
5913140
Method for reduction of plasma charging damage during chemical vapor deposition
Dec 23, 96
Jun 15, 99
[H01L]
159
6174450
Methods and apparatus for controlling ion energy and plasma density in a plasma processing system
Apr 16, 97
Jan 16, 01
[H05H, H01L]
157
- No Patents to Display
Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2018/0033,622
DOPED ALD FILMS FOR SEMICONDUCTOR PATTERNING APPLICATIONS
Sep 28, 16
Feb 01, 18
[H01L]
2018/0033,672
SUBSTRATE SUPPORT WITH INCREASING AREAL DENSITY AND CORRESPONDING METHOD OF FABRICATING
Jul 27, 16
Feb 01, 18
[C23C, H01J, H01L]
2018/0025,891
SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATED WITH AN EDGE REGION WITHIN A PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS
Jun 28, 17
Jan 25, 18
[H01J, H01L]
2018/0012,733
COLLAR, CONICAL SHOWERHEADS AND/OR TOP PLATES FOR REDUCING RECIRCULATION IN A SUBSTRATE PROCESSING SYSTEM
Jul 11, 16
Jan 11, 18
[C23C, H01J]
2018/0012,785
ELECTROSTATIC CHUCK WITH FEATURES FOR PREVENTING ELECTRICAL ARCING AND LIGHT-UP AND IMPROVING PROCESS UNIFORMITY
Jun 27, 17
Jan 11, 18
[H01L]
2018/0005,802
SYSTEMS AND METHODS FOR TAILORING ION ENERGY DISTRIBUTION FUNCTION BY ODD HARMONIC MIXING
Jul 01, 16
Jan 04, 18
[H01J]
2018/0005,814
SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT
Jul 01, 16
Jan 04, 18
[C23C, H01J, H01L]
2018/0005,819
SUBSTRATE PROCESSING METHOD FOR DEPOSITING A BARRIER LAYER TO PREVENT PHOTORESIST POISONING
Jun 21, 17
Jan 04, 18
[C07F, H01L]
2018/0005,839
ENVIRONMENTALLY GREEN PROCESS AND COMPOSITION FOR COBALT WET ETCH
Jun 29, 16
Jan 04, 18
[H01L]
- No Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9879795
Additively manufactured gas distribution manifold
Jan 15, 16
Jan 30, 18
[F16K, C23C, H01J, F17D, B33Y]
9881772
Multi-radiofrequency impedance control for plasma uniformity tuning
Mar 28, 12
Jan 30, 18
[C23F, C23C, H01J, H01L]
9873940
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
Dec 16, 14
Jan 23, 18
[C23C]
9875883
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Jul 26, 17
Jan 23, 18
[C23C, H01J, H01L]
9875891
Selective inhibition in atomic layer deposition of silicon-containing films
Jan 05, 17
Jan 23, 18
[C23C, H01L]
9875968
Interlevel conductor pre-fill utilizing selective barrier deposition
Feb 24, 17
Jan 23, 18
[H01L]
9870547
System and method of demand and capacity management
Jan 19, 09
Jan 16, 18
[G06Q, G06F, G06G]
9870917
Variable temperature hardware and methods for reduction of wafer backside deposition
Feb 24, 16
Jan 16, 18
[C23F, C23C, H01J, H01L]
9870932
Pressure purge etch method for etching complex 3-D structures
Jul 27, 16
Jan 16, 18
[H01J, H01L]
9871759
Social network service for semiconductor manufacturing equipment and users
Sep 11, 15
Jan 16, 18
[H04L, G21C, G06F, H01L, G01M]
9863041
Internally heated porous filter for defect reduction with liquid or solid precursors
Oct 07, 15
Jan 09, 18
[C23C, H01J, B01D]
9864361
Flexible temperature compensation systems and methods for substrate processing systems
Sep 23, 15
Jan 09, 18
[G05B]
9865455
Nitride film formed by plasma-enhanced and thermal atomic layer deposition process
Sep 07, 16
Jan 09, 18
[C23C, H01L]
9865472
Fabrication of a silicon structure and deep silicon etch with profile control
Apr 20, 16
Jan 09, 18
[H01J, H01L]
9865501
Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer
Nov 21, 13
Jan 09, 18
[C23C, H01J, H01L, C25D]
- No Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2016/0270,237
Copper Interconnect Device Including Surface Functionalized Graphene Capping Layer and Fabrication Method Thereof
ABAN
Mar 07, 16
Sep 15, 16
[H05K]
2016/0233,114
CHAMBERS FOR PARTICLE REDUCTION IN SUBSTRATE PROCESSING SYSTEMS
ABAN
Feb 05, 15
Aug 11, 16
[C23C, H01L]
2016/0148,813
GAS INJECTION METHOD FOR UNIFORMLY PROCESSING A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
ABAN
Nov 25, 14
May 26, 16
[H01L]
2016/0138,160
REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT MATERIALS
ABAN
Nov 18, 14
May 19, 16
[C23C]
2016/0111,342
METHOD AND APPARATUS FOR CHARACTERIZING METAL OXIDE REDUCTION
ABAN
Oct 15, 15
Apr 21, 16
[C23C, H01J, H01L, G01N]
2016/0079,100
VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER
ABAN
Sep 17, 14
Mar 17, 16
[C23C, H01L, B25J]
2016/0042,945
COVERAGE OF HIGH ASPECT RATIO FEATURES USING SPIN-ON DIELECTRIC THROUGH A WETTED SURFACE WITHOUT A PRIOR DRYING STEP
ABAN
Aug 11, 14
Feb 11, 16
[H01L]
2015/0376,792
ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING
ABAN
Jun 30, 14
Dec 31, 15
[C23C, H01L, C25D]
2015/0380,278
HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEMICONDUCTOR PRECURSOR CHEMICALS
ABAN
Jun 30, 14
Dec 31, 15
[H01L, B01D]
2015/0380,296
CLEANING OF CARBON-BASED CONTAMINANTS IN METAL INTERCONNECTS FOR INTERCONNECT CAPPING APPLICATIONS
ABAN
Jun 25, 14
Dec 31, 15
[C23C, H01L]
2015/0364,300
DETERMINING PRESENCE OF CONDUCTIVE FILM ON DIELECTRIC SURFACE OF REACTION CHAMBER
ABAN
Jun 16, 14
Dec 17, 15
[C23C, H01J]
2015/0364,322
SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS AND METHOD OF FORMING THEREOF
ABAN
Aug 06, 15
Dec 17, 15
[C23C, H01L]
2015/0307,994
ELECTROLESS DEPOSITION OF CONTINUOUS NICKEL LAYER USING COMPLEXED Ti3+ METAL IONS AS REDUCING AGENTS
ABAN
Apr 29, 14
Oct 29, 15
[C23C]
2015/0299,882
NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE
ABAN
Apr 18, 14
Oct 22, 15
[H01L, C25D]
2015/0299,886
METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE METAL LAYER
ABAN
Apr 18, 14
Oct 22, 15
[H01L, C25D]
2015/0247,238
RF CYCLE PURGING TO REDUCE SURFACE ROUGHNESS IN METAL OXIDE AND METAL NITRIDE FILMS
ABAN
Mar 03, 14
Sep 03, 15
[C23C, H01L]
- No Patents to Display
Top Inventors for This Owner
Upgrade to the Premium Level to View Top Inventors for this Owner. Learn More |
Inventor Name
Address
MATTERS
- No Inventor to Display
Free |
Premium |
Professional |
Enterprise |
Patent Searching | ![]() |
![]() |
![]() |
![]() |
|||
Technology Searching | ![]() |
![]() |
![]() |
![]() |
|||
Owner and Inventor Searching | ![]() |
![]() |
![]() |
![]() |
|||
Patent Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Owner Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Attorney Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Inventor Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Technology Analytics | ![]() |
![]() |
![]() |
![]() |
|||
Mobile Searching | ![]() |
![]() |
![]() |
![]() |
|||
Tagging | ![]() |
![]() |
![]() |
||||
Advanced Patent Analytics | ![]() |
![]() |
![]() |
||||
Advanced Owner Analytics | ![]() |
![]() |
![]() |
||||
Mobile Portfolio/Analytics | ![]() |
![]() |
![]() |
||||
Detailed Attorney Information | ![]() |
![]() |
|||||
Prosecution analytics | ![]() |
![]() |
|||||
Pre-publication Data | ![]() |
![]() |
|||||
Monthly PAIR Information and Watches | ![]() |
![]() |
|||||
Number of patents in all portfolios | 100 (maximum) | 1000 (maximum) | 2000 (maximum) | Unlimited | |||
Watches in all categories (Watch) | 20 (maximum) | 10 (maximum) | 50 (maximum) | 500 (maximum) | Unlimited | ||
Maximum number of portfolios | 5 (maximum) | 10 (maximum) | 100 (maximum) | Unlimited | |||
Maximum number of comparisons | 1 (maximum) | 5 (maximum) | 20 (maximum) | Unlimited |
FREE |
$9.95/mo |
$39.95/mo |
$99.95/mo |
||||
PAIR Watch Weekly Update | $2.75/mo/patent | $2.65/mo/patent | |||||
PAIR Watch Daily Update | $5.75/mo/patent | $5.65/mo/patent | |||||
Trial Version | Trial Version | Trial Version | |||||
Current Plan Upgrade Now | Current Plan Upgrade Now | Current Plan Upgrade Now | Current Plan Upgrade Now |
We are sorry but your current membership does not allow you access to this feature. Upgrade to our Premium Level to View Top Owners in Class/Subclass! Learn More |