KABUSHIKI KAISHA SHIBAURA SEISAKUSHO AKA SHIBAURA ENGINEERING WORKS CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 299
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 166

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5336029 Loading apparatus having a suction-hold mechanismSep 12, 91Aug 09, 94[B65G]
5324087 Sucked substrate detecting apparatusFeb 10, 93Jun 28, 94[B66K]
5254236 Sputtering apparatusSep 30, 91Oct 19, 93[C23C]
5205918 Apparatus having a vacuum chamberMay 30, 91Apr 27, 93[C23C]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5201994 Dry etching methodExpiredJul 17, 90Apr 13, 93[C03C, B44C]
4809596 Apparatus for swelling and drying foods under reduced pressureExpiredJul 15, 87Mar 07, 89[A23G]
4771730 Vacuum processing apparatus wherein temperature can be controlledExpiredSep 09, 87Sep 20, 88[C23C]
4693777 Apparatus for producing semiconductor devicesExpiredNov 27, 85Sep 15, 87[C03C, C23F, B44C]
4645218 Electrostatic chuckExpiredJul 30, 85Feb 24, 87[B25B]
4600492 Magnet driving method and device for sameExpiredJul 24, 85Jul 15, 86[C23C]
4351714 Sputter-etching deviceExpiredApr 21, 81Sep 28, 82[C23C]
4327645 Tie tamperExpiredJul 24, 80May 04, 82[E01B]
4323014 Tie tamperExpiredJul 24, 80Apr 06, 82[B63F]
4221652 Sputtering deviceExpiredApr 06, 76Sep 09, 80[C23C]

Top Inventors for This Owner

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