Integrated Process Systems Ltd
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 28, 2007 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,053 Total Citation Count
- Aug 18, 2003 Earliest Filing
- 4 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2007/0144,557 Cleaning method of apparatus for depositing AI-containing metal film and AI-containing metal nitride filmAbandonedAug 22, 06Jun 28, 07[B08B]
2006/0178,019 Low temperature deposition of silicon oxides and oxynitridesAbandonedAug 18, 03Aug 10, 06[H01L]
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