IPS LTD.
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Apr 09, 2009 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,094 Total Citation Count
- May 18, 1999 Earliest Filing
- 14 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
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Recent Publications
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Recent Patents
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Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2009/0090,384 CLEANING METHOD OF APPARATUS FOR DEPOSITING METAL CONTAINING FILMAbandonedJan 22, 07Apr 09, 09[C25F]
2006/0210,712 Method of depositing thin film on substrate using impulse ALD processAbandonedMar 16, 06Sep 21, 06[C23C]
2006/0201,428 Shower head and method of fabricating the sameAbandonedMay 18, 06Sep 14, 06[C23C, C23F]
2005/0223,982 Apparatus and method for depositing thin film on wafer using remote plasmaAbandonedOct 19, 04Oct 13, 05[C23C]
2004/0191,413 Reactor for thin film deposition and method for depositing thin film on wafer using the reactorAbandonedMay 10, 04Sep 30, 04[C23C]
2004/0101,622 Method of depositing thin film using aluminum oxideAbandonedNov 19, 03May 27, 04[C23C, H01L]
6231672 Apparatus for depositing thin films on semiconductor wafer by continuous gas injectionExpiredMay 18, 99May 15, 01[C23C]
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