IPEC PRECISION, INC.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6238587 Method for treating articles with a plasma jetExpiredNov 25, 98May 29, 01[B05D]
6105534 Apparatus for plasma jet treatment of substratesExpiredNov 25, 98Aug 22, 00[C23C]
6099056 Non-contact holder for wafer-like articlesExpiredNov 25, 98Aug 08, 00[B25J]
6040548 Apparatus for generating and deflecting a plasma jetExpiredNov 25, 98Mar 21, 00[B23K]
5700297 Apparatus for providing consistent, non-jamming registration of notched semiconductor wafersExpiredFeb 20, 96Dec 23, 97[B23Q]
5688415 Localized plasma assisted chemical etching through a maskExpiredMay 30, 95Nov 18, 97[B23K]

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