IPEC PLANAR, INC.

Patent Owner

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
B24B MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 165
 
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 135

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6361646 Method and apparatus for endpoint detection for chemical mechanical polishingMar 18, 99Mar 26, 02[C23F]
5257478 Apparatus for interlayer planarization of semiconductor materialJan 31, 92Nov 02, 93[B24B]

Expired/Abandoned/Withdrawn Patents

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Top Inventors for This Owner

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