HITACHI TOKYO ELECTRONICS CO., LTD.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 4124
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 3203
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
B01D SEPARATION 1133
 
  
 
B44C PRODUCING DECORATIVE EFFECTS 133
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 145

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8558173 Method of inspecting pattern and inspecting instrumentSep 12, 06Oct 15, 13[G01N]
7112791 Method of inspecting pattern and inspecting instrumentAug 12, 04Sep 26, 06[H01J]
6777677 Method of inspecting pattern and inspecting instrumentJun 18, 03Aug 17, 04[H01J, G01N]
6664549 Wafer chuck, exposure system, and method of manufacturing semiconductor deviceJul 29, 02Dec 16, 03[H01L]
6583414 Method of inspecting pattern and inspecting instrumentNov 30, 00Jun 24, 03[H01J, G21K, G01N]
5593540 Plasma etching system and plasma etching methodApr 27, 95Jan 14, 97[B44C]
5485016 Atmospheric pressure ionization mass spectrometerApr 25, 94Jan 16, 96[H01J]
5482524 Atmospheric pressure, elevated temperature gas desorption apparatusAug 03, 94Jan 09, 96[B01D]
5423936 Plasma etching systemOct 19, 93Jun 13, 95[H01L]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7163886 Semiconductor integrated circuit device and process for manufacturing the sameExpiredAug 13, 04Jan 16, 07[H01L]
6615390 Method of manufacturing IC cardsExpiredFeb 16, 01Sep 02, 03[G06F]
6516515 Semiconductor integrated circuitExpiredJun 07, 01Feb 11, 03[H05K]
6400020 Aggregate of semiconductor devices including semiconductor packages arranged on a first tape and wound on a reel and also including a spacer tape provided with spacersExpiredApr 25, 00Jun 04, 02[H01L]
6146920 Bump formation methodExpiredJul 10, 98Nov 14, 00[H01L]
5304797 Gas analyzer for determining impurity concentration of highly-purified gasExpiredFeb 11, 93Apr 19, 94[H01J]
5173719 Method and apparatus for the inspection of patternsExpiredDec 19, 90Dec 22, 92[G01N, G01B]
5080039 Processing apparatusExpiredJun 08, 90Jan 14, 92[C23C]
5062771 Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamberExpiredMar 20, 89Nov 05, 91[F04D]
5060841 wire bonding method and apparatus and method of producing semiconductor device by use of wire bonding apparatusExpiredOct 02, 90Oct 29, 91[H01L, H05K]
5031821 Semiconductor integrated circuit device, method for producing or assembling same, and producing or assembling apparatus for use in the methodExpiredAug 16, 89Jul 16, 91[H01L, B23K]
5027107 Frequency sensorExpiredJun 27, 89Jun 25, 91[G08B]
4996422 Mass spectrometerExpiredJun 01, 89Feb 26, 91[H01J]
4957781 Processing apparatusExpiredJun 02, 88Sep 18, 90[C23C]
4835114 Method for LPCVD of semiconductors using oil free vacuum pumpsExpiredFeb 19, 87May 30, 89[B05D, H01C]
4763827 Manufacturing methodExpiredApr 16, 87Aug 16, 88[B23K]
4702371 Container for electrical componentsExpiredJun 26, 86Oct 27, 87[H05F]
4701608 Projection aligner with a sensor for monitoring light quantityExpiredJan 29, 86Oct 20, 87[G01J, G05D]
4674670 Manufacturing apparatusExpiredAug 06, 85Jun 23, 87[B23K]

Top Inventors for This Owner

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