HITACHI KOKUSAI ELECTRIC

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 398
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9728400 Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumJan 29, 16Aug 08, 17[C23C, H01L]
9460916 Method of manufacturing semiconductor device and substrate processing apparatusNov 12, 15Oct 04, 16[H01L, B08B]
7713582 Substrate processing method for film formationFeb 28, 08May 11, 10[C23C]

Expired/Abandoned/Withdrawn Patents

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Top Inventors for This Owner

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