GASONICS INTERNATIONAL CORPORATION
Patent Owner
Stats
- 2 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jun 04, 2002 most recent publication
Details
- 2 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 270 Total Citation Count
- Mar 29, 1979 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
6399462 Method and structure for isolating integrated circuit components and/or semiconductor active devicesExpiredJun 30, 97Jun 04, 02[H01L]
5498292 Heating device used for a gas phase growing mechanism or heat treatment mechanismExpiredJan 19, 95Mar 12, 96[C23C, F27B]
4427378 Closure and seal construction for high-pressure oxidation furnace and the likeExpiredMar 29, 82Jan 24, 84[F23M, F26B, F27D]
4268538 High-pressure, high-temperature gaseous chemical method for silicon oxidationExpiredMar 29, 79May 19, 81[H01L]
Top Inventors for This Owner
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