EPPZ
Patent Owner
Stats
- 3 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Nov 11, 2014 most recent publication
Details
- 3 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 760 Total Citation Count
- Oct 09, 2002 Earliest Filing
- 0 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8882913 Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereofFeb 16, 07Nov 11, 14[C23C, H01L]
7479303 Method for chemical vapor deposition (CVD) with showerhead and method thereofMay 17, 06Jan 20, 09[C23C]
7156921 Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rateOct 09, 02Jan 02, 07[C23C]
Expired/Abandoned/Withdrawn Patents
- No Patents to Display
Top Inventors for This Owner
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