ELITH LLC

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 295
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 2126
 
  
 
A61N ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY 1106
 
  
 
G03C PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES 145
 
  
 
G06F ELECTRIC DIGITAL DATA PROCESSING 1446
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 145
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7102732 Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical elementApr 28, 03Sep 05, 06[G03B]
7050957 Projection electron beam lithography apparatus and method employing an estimatorAug 29, 01May 23, 06[G06F]
6706609 Method of forming an alignment feature in or on a multi-layered semiconductor structureMay 29, 01Mar 16, 04[H01L]
6633366 Lithographic apparatus, device manufacturing method, and device manufactured therebyAug 10, 01Oct 14, 03[G21K, G03B, A61N]
6528799 Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systemsOct 20, 00Mar 04, 03[H01J]
6440620 Electron beam lithography focusing through spherical aberration introductionOct 04, 00Aug 27, 02[G03C]
6333508 Illumination system for electron beam lithography toolMay 30, 00Dec 25, 01[H01J]

Expired/Abandoned/Withdrawn Patents

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