EDWARDS VACUUM LLC
Patent Owner
Stats
- 19 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Mar 08, 2018 most recent publication
Details
- 19 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 571 Total Citation Count
- Jan 26, 1996 Earliest Filing
- 4 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2017/0030,503 APPARATUS AND METHOD FOR SECURING PIPE HEATERS AND PIPE INSULATION TO PIPE SYSTEMSJul 30, 15Feb 02, 17[F16L, B23P]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9888526 Detecting heater failure in a group of electric heaters in a process equipment heating systemJul 30, 15Feb 06, 18[H01L, H05B, G01R]
8636019 In-situ removal of semiconductor process residues from dry pump surfacesApr 22, 08Jan 28, 14[B08B]
8382909 Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection systemNov 23, 05Feb 26, 13[B08B]
7278831 Apparatus and method for control, pumping and abatement for vacuum process chambersDec 31, 03Oct 09, 07[F04B]
7140833 Integrated turbo/drag/regenerative pump with counter-rotating turbo bladesNov 04, 04Nov 28, 06[F01D]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
6701972 Vacuum load lock, system including vacuum load lock, and associated methodsExpiredJan 11, 02Mar 09, 04[B65B]
Top Inventors for This Owner
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