EBARA CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B24B MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 4532
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 207185
 
  
 
C25D PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING 994
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 8312
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 55151
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 4683
 
  
 
F04D NON-POSITIVE-DISPLACEMENT PUMPS4139
 
  
 
B01D SEPARATION 3797
 
  
 
F04B POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS 3630
 
  
 
1303 EQUIPMENT FOR DISTRIBUTION OR CONTROL OF ELECTRIC POWER3240

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0068,877 SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHODAug 29, 17Mar 08, 18[H01L, B08B]
2018/0051,708 VOLUTE PUMPMar 24, 16Feb 22, 18[F04D]
2018/0051,718 VOLUTE PUMPMar 24, 16Feb 22, 18[F04D]
2018/0045,213 IMPELLER FOR CENTRIFUGAL PUMPSMar 18, 16Feb 15, 18[F04D]
2018/0047,572 DRESSING DEVICE, POLISHING APPARATUS, HOLDER, HOUSING AND DRESSING METHODAug 11, 17Feb 15, 18[B24B, H01L]
2018/0021,920 METHOD OF MONITORING A DRESSING PROCESS AND POLISHING APPARATUSSep 29, 17Jan 25, 18[B24B]
2018/0016,698 SUBSTRATE HOLDER AND PLATING APPARATUS USING THE SAMEJul 10, 17Jan 18, 18[C25D]
2018/0001,440 SUBSTRATE PROCESSING APPARATUSJun 06, 17Jan 04, 18[B24B, H01L, B08B]
2017/0368,661 POLISHING APPARATUS, POLISHING METHOD AND POLISHING CONTROL PROGRAMJun 26, 17Dec 28, 17[B24B]
2017/0370,016 CLEANING APPARATUS, PLATING APPARATUS USING THE SAME, AND CLEANING METHODJun 28, 17Dec 28, 17[C25D, H01L, B08B]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9919403 Polishing apparatus, polishing pad positioning method, and polishing padJul 01, 14Mar 20, 18[B24B]
9922852 Pressure calibration jig and substrate processing apparatusApr 06, 15Mar 20, 18[B24B, H01L]
D813180 Elastic membrane for semiconductor wafer polishing apparatusOct 07, 16Mar 20, 18[1303]
9914196 Polishing apparatus and polishing methodMar 10, 15Mar 13, 18[B24B]
9915938 Adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatusJan 14, 15Mar 13, 18[G05B, G06F]
9908212 Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machineMay 11, 15Mar 06, 18[B24B, H01L]
9904280 Substrate treatment apparatus and control deviceJan 06, 15Feb 27, 18[G05B, G06F]
9892953 Substrate gripping apparatusJan 14, 16Feb 13, 18[H01L, B25B]
9884401 Elastic membrane and substrate holding apparatusAug 27, 13Feb 06, 18[B24B]
D808349 Elastic membrane for semiconductor wafer polishing apparatusAug 17, 16Jan 23, 18[1303]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0305,607 COUPLING GUARDAbandonedApr 13, 16Oct 20, 16[F16P]
2016/0160,352 ELECTROLESS PLATING APPARATUSAbandonedFeb 12, 16Jun 09, 16[C23C]
2016/0130,702 METHOD OF OPERATING AN ELECTROLESS PLATING APPARATUSAbandonedNov 04, 15May 12, 16[C23C]
2015/0367,284 EXHAUST GAS TREATMENT APPARATUSAbandonedJun 16, 15Dec 24, 15[F01N, B01D]
2015/0308,010 SUBSTRATE PROCESSING METHODAbandonedApr 20, 15Oct 29, 15[C25D]
2015/0298,283 SUBSTRATE TREATMENT DEVICEAbandonedApr 17, 15Oct 22, 15[B24B]
2015/0275,566 REFLECTING MIRROR POSTURE ADJUSTMENT STRUCTURE, CEILING PLATE OPENING AND CLOSING MECHANISM, AND INSPECTION DEVICEAbandonedMar 25, 15Oct 01, 15[E06B, G02B, G01B, E05F]
2015/0267,302 ELECTROLESS PLATING METHODAbandonedMar 16, 15Sep 24, 15[C23C]
2015/0270,147 SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNITAbandonedMar 23, 15Sep 24, 15[H01L, B25J]
2015/0191,830 ETCHING LIQUID, ETCHING METHOD, AND METHOD OF MANUFACTURING SOLDER BUMPAbandonedJan 05, 15Jul 09, 15[C09K, C23F, G03F]
2015/0183,084 POLISHING END POINT DETECTION METHOD AND POLISHING END POINT DETECTION APPARATUSAbandonedDec 26, 14Jul 02, 15[B24B]
2015/0140,907 POLISHING METHOD AND POLISHING APPARATUSAbandonedOct 21, 14May 21, 15[B24B]
2015/0122,295 SUBSTRATE PROCESSING APPARATUSAbandonedOct 22, 14May 07, 15[H01L]
2015/0090,584 PLATING APPARATUS AND CLEANING DEVICE USED IN THE PLATING APPARATUSAbandonedSep 26, 14Apr 02, 15[C25D]
2015/0041,645 IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD AND DEFECT INSPECTION APPARATUSAbandonedAug 06, 14Feb 12, 15[H01J]
2015/0017,745 POLISHING METHOD AND POLISHING APPARATUSAbandonedJul 03, 14Jan 15, 15[B24B, H01L]
2015/0017,880 FILM-THICKNESS MEASURING APPARATUS, FILM-THICKNESS MEASURING METHOD, AND POLISHING APPARATUS HAVING THE FILM-THICKNESS MEASURING APPARATUSAbandonedJul 09, 14Jan 15, 15[B24B, H01L, G01B]
2015/0017,889 POLISHING APPARATUSAbandonedJul 08, 14Jan 15, 15[B24B]
2015/0013,905 WET PROCESSING APPARATUS AND PLATING APPARATUSAbandonedJul 08, 14Jan 15, 15[C23C, C25D, C23F]
2014/0367,570 SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHODAbandonedJul 08, 14Dec 18, 14[H01J]

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