Carl Ziess SMT AG

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 145
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1127

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8097847 Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsJun 25, 09Jan 17, 12[H01J]
6400794 Illumination system, particularly for EUV lithographyNov 03, 00Jun 04, 02[G21K]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2005/0180,013 Grating element for filtering wavelengths < 100 nmAbandonedSep 21, 04Aug 18, 05[G01J]

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