CYMER, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01S DEVICES USING STIMULATED EMISSION3459
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS396
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 3125
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 285
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 276
 
  
 
F16F SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION158
 
  
 
G01M TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR166
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1205
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361
 
  
 
H02H EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS 176

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8319201 Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance waveFeb 17, 11Nov 27, 12[H05G]
8198615 Gas management system for a laser-produced-plasma EUV light sourceFeb 02, 10Jun 12, 12[G21K, H05H]
8126027 Line narrowing moduleApr 14, 11Feb 28, 12[H01S]
8102889 Multi-chamber gas discharge laser bandwidth control through discharge timingAug 10, 10Jan 24, 12[H01S]
8098698 Active spectral control of DUV laser light sourceNov 01, 10Jan 17, 12[H01S]
8035092 Laser produced plasma EUV light sourceJan 11, 10Oct 11, 11[H04H]
8017924 Drive laser delivery systems for EUV light sourceFeb 04, 09Sep 13, 11[H01J]
7928417 LPP EUV light source drive laser systemOct 24, 08Apr 19, 11[G01J, G01N]
7851011 Anodes for fluorine gas discharge lasersJun 11, 07Dec 14, 10[B05D]
7852899 Timing control for two-chamber gas discharge laser systemJul 06, 06Dec 14, 10[H01S]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0102,881 METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTICAbandonedOct 12, 12Apr 17, 14[B44C, B32B]
8653492 Target for laser produced plasma extreme ultraviolet light sourceWithdrawnMar 14, 13Feb 18, 14[H05G]
2012/0162,657 Coherency Reduction for Bandwidth MeasurementAbandonedMar 04, 12Jun 28, 12[G01J]
2011/0122,901 HIGH POWER HIGH PULSE REPETITION RATE GAS DISCHARGE LASER SYSTEMAbandonedFeb 03, 11May 26, 11[H01S]
2010/0176,313 Extreme ultraviolet light sourceAbandonedDec 14, 09Jul 15, 10[G21K]
2010/0097,704 Line narrowing moduleAbandonedDec 14, 09Apr 22, 10[G02B]
2010/0074,295 Immersion lithography laser light source with pulse stretcherAbandonedNov 20, 09Mar 25, 10[H01S]
2010/0024,980 Laser produced plasma euv light sourceAbandonedOct 05, 09Feb 04, 10[C23F]
2009/0296,755 Laser systemAbandonedOct 30, 07Dec 03, 09[H01S]
2009/0250,637 System and methods for filtering out-of-band radiation in EUV exposure toolsAbandonedMar 31, 09Oct 08, 09[G01J, A61N]
2009/0238,225 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvementsAbandonedMay 22, 09Sep 24, 09[H01S]
7476887 EUV light source optical elementsWithdrawnMar 19, 07Jan 13, 09[G01J, G02B]
RE40343 Control circuit with automatic DC offsetExpiredAug 28, 03May 27, 08[H01S]
7368741 Extreme ultraviolet light sourceExpiredApr 14, 05May 06, 08[H01J]
2007/0278,193 Device and method to create a low divergence, high power laser beam for material processing applicationsAbandonedJun 05, 06Dec 06, 07[B23K]
2007/0160,103 Gas discharge laser light source beam delivery unitAbandonedMar 06, 07Jul 12, 07[H01S]
7230964 Lithography laser with beam delivery and beam pointing controlExpiredApr 29, 03Jun 12, 07[H01S]
7218661 Line selected F.sub.2 two chamber laser systemExpiredMay 25, 04May 15, 07[H01S]
2007/0099,001 Blister resistant optical coatingsAbandonedOct 27, 05May 03, 07[B32B]
2007/0088,794 Web-based method for information servicesAbandonedSep 27, 05Apr 19, 07[G06F]

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