COHERENT LASERSYSTEMS GMBH & CO. KG
Patent Owner
Stats
- 13 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Feb 27, 2018 most recent publication
Details
- 13 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 141 Total Citation Count
- Mar 26, 1997 Earliest Filing
- 1 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2013/0341,310 MONITORING METHOD AND APPARATUS FOR EXCIMER LASER ANNEALING PROCESSMay 31, 13Dec 26, 13[H01L, G01N, C30B]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9335276 Monitoring method and apparatus for control of excimer laser annealingMar 03, 14May 10, 16[H01L, G01N, G02B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
Top Inventors for This Owner
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